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FastGate Inline CV/IV Measurement Device
It is a device that can be used inline because it does not require electrode formation, does not damage the wafer, and leaves no contamination.
Measurement of various semiconductor carrier transport characteristics is possible! Non-contact mobility measurement using microwave reflection!
For the manufacturing of semiconductor devices, carrier mobility is a very important parameter. The "LEI-1610 Series" is a non-contact mobility measurement device capable of measuring various semiconductor carrier transport characteristics such as mobility, carrier concentration, and sheet resistance. Carrier mobility, sheet resistance, and sheet charge density can be measured non-contact and destructively on Si wafers ranging from 2 inches to a maximum of 8 inches, as well as on compound semiconductor (GaAs, GaN, InP, etc.) epi wafers. 【Features】 ■ Non-contact mobility measurement using microwave reflection ■ Standard measurement device for high-frequency device characteristics ■ High correlation with measurement results from the Hall effect ■ Multi-carrier modeling option *For more details, please refer to the related link page or feel free to contact us.
Excellent measurement linearity over a wide range! Can be verified on a PC monitor as a three-dimensional graphic map.
The "LEI-1510 series" is a non-contact sheet resistance measurement device manufactured by the former Reihiton company. By attaching a robot, it is possible to quickly measure and process multiple samples. It solves the reproducibility issues caused by probe contact contamination and the contact condition that occur with the four-probe method. It measures sheet resistance non-contact and destructively for Si wafers ranging from 2 inches to a maximum of 8 inches, as well as compound semiconductor (GaAs, GaN, InP, etc.) epi wafers. 【Features】 - Solves reproducibility issues caused by probe contact contamination and contact conditions - Capable of quickly measuring and processing multiple samples - Excellent measurement linearity over a wide range of 0.035 to 3200 ohm/sq. - Measurement data can be viewed as a three-dimensional graphic map on a PC monitor *For more details, please refer to the PDF document or feel free to contact us.
